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Journal Articles

Characterization and degradation of ZEP520 resist film by TOF-PSID and NEXAFS

Ikeura, Hiromi*; Sekiguchi, Tetsuhiro; Koike, Masaki*

Journal of Electron Spectroscopy and Related Phenomena, 144-147, p.453 - 455, 2005/06

https://doi.org/10.1016/j.elspec.2005.01.152

Times Cited Count：16 Percentile：56.9(Spectroscopy)

no abstracts in English